预浓缩气相色谱质谱在半导体洁净室VOC管控中的应用  

Applications of Preconcentrator-Gas Chromatography-Mass Spectrometer in the Semiconductor Clean Room VOC Control

作　　者：刘彦云[1,2] 黄其煜[1] 李明 

机构地区：[1]上海交通大学微电子学院,上海200240 [2]中芯国际集成电路制造(上海)有限公司,上海201203

出　　处：《电子工业专用设备》2012年第9期31-34,50,共5页Equipment for Electronic Products Manufacturing

摘　　要：对预浓缩气相色谱质谱在半导体洁净室VOC(Volatile Organic compound,挥发性有机化合物)管控中的应用进行了系统的归纳和总结。主要从三个方面的应用进行了讨论:一是洁净室VOC来源确认,二是确认厂务系统处理效率的应用,三是厂务系统处理最终效果的确认。也是实验室分析仪器在半导体行业应用方面的成功范例。Preconcentrator-GC-MS was used in semiconductor clean room VOC control.Three applications were discussed in this research.The first application was clean room VOC source confirmation,the second application was chemical filter system efficiency test,and the third was the final effect confirmation after chemical filter system installation.This research is a successful example of lab analysis tool application in the semiconductor field.

关 键 词：预浓缩气相色谱质谱 挥发性有机化合物 洁净室 化学过滤器 

分 类 号：TN305.97[电子电信—物理电子学]