双阴极等离子溅射沉积TiC薄膜对金刚石工具性能的影响  

Effects of TiC Coating Prepared by Ion Sputtering with Double Cathodes on Properties of Diamond Tools

作　　者：罗雯[1] 揭晓华[1] 蒙云开 徐江[3] 陶洪亮 魏菊 

机构地区：[1]广东工业大学材料与能源学院,广州510006 [2]广东奔朗新材料股份有限公司,广东佛山528313 [3]南京航空航天大学材料科学与技术学院,南京210016

出　　处：《中国表面工程》2012年第5期26-30,共5页China Surface Engineering

基　　金：粤港招标项目(2011243);广东省教育部产学研结合项目(2011B090400178)

摘　　要：采用双阴极等离子溅射沉积方法对金刚石颗粒表面进行镀TiC处理。利用扫描电子显微镜(SEM)和X射线衍射仪(XRD)进行形貌和物相分析。使用金刚石单颗粒静压强度测定仪和人造金刚石冲击强度测定仪检测金刚石的静压强度和冲击韧性。以相同型号和粒度的普通金刚石颗粒为对比样品,讨论了镀TiC处理对金刚石工具的影响。结果表明,金刚石表面形成了一层均匀且致密的TiC薄膜,该薄膜以柱状方式沿垂直于金刚石表面方向生长。在镀层的保护下,金刚石的单颗粒强度和冲击韧性得到了提高。由于镀层改善了金刚石对胎料的润湿性,金刚石工具的冲击强度和抗弯强度也得到了提高。TiC coating was prepared on the surface of diamond grains by ion sputtering with double cathodes. The surface morphology, composition of the coating was analyzed by SEM and XRD. The static pressure strength and the impact toughness of the diamond were detected by the static pressure strength tester and the synthetic diamond impact strength tester. The effects of TiC coating on properties of the diamond tools were compared with the uncoated diamond possessing the same grain size and type. The results show that the com- pact and even TiC coating forms and it grows up in the direction that is perpendicular to the surface of the dia mond with the shape of columnar. Owing to the protection of the TiC coating layer, the static pressure strength and thermal stability of the diamond can be improved. The impacting and bending strength of the diamond tools also increase because the existence of TiC coating improves the wetness between the diamond and the tool matrix.

关 键 词：双阴极等离子溅射 TiC镀层 金刚石 

分 类 号：TG174.444[金属学及工艺—金属表面处理]