高灵敏度谐振式红外光声气体传感器研究  

Research of high sensitive resonant infraredphoto-acoustic gas sensor

作　　者：方兴[1] 李嘉[1] 纪新明[1] 包宗明[1] 黄宜平[1] 

机构地区：[1]复旦大学专用集成电路及系统国家重点实验室微电子学系,上海200433

出　　处：《传感器与微系统》2012年第10期57-60,共4页Transducer and Microsystem Technologies

摘　　要：研究了高灵敏度谐振式红外光声气体传感系统,对系统的谐振频谱进行了测试分析,观察到了新的谐振模式。经过对比,发现选用新的谐振模式具有更高的测试灵敏度和信噪比,新的谐振模式源于两边的缓冲腔体内的谐振。研究了麦克风输出腔体结构对信号的影响,发现增加输出腔内麦克风到谐振腔的距离可显著增加光声信号。另外,在激光岀射端口放置反射金属膜也有利于提高光声信号,从而提高系统检测极限。High sensitive resonant infrared photo-acoustic gas sensitive system is studied,the resonant frequency spectrum of the system is measured and analyzed and a new resonant model is observed.After a series of comparison,it＇s found that the system has better performance in sensitivity and SNR using new resonant model.It is believed that the new resonant model is caused by the resonance of the two buffer cavities on both sides.The influence of output cavity structure of microphone on the opto-acoustic signal,it is found that the signal can be amplified obviously by increasing the distance from microphone to resonant cavity.In addition,the signal can be amplified if a reflecting metal film is located in the outlet of laser.

关 键 词：光声传感器 谐振式 频率 灵敏度 信噪比 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]