离轴非球面镜精磨阶段的三坐标检测技术  

Measuring technique for off-axis aspherical mirror in fine grinding process using coordinate measurement machine

作　　者：林长青[1] 景洪伟[1] 匡龙[1] 吴时彬[1] 曹学东[1] 李杰[1] 

机构地区：[1]中国科学院光电技术研究所,成都610209

出　　处：《强激光与粒子束》2012年第11期2665-2668,共4页High Power Laser and Particle Beams

摘　　要：提出了使用三坐标测量机(CMM)对离轴非球面镜进行测量的方法。通过CMM对离轴非球面镜镜面进行自动测量,获得实际面形的三维坐标数据,并与理论离轴非球面镜模型进行分析比较,得到实际镜面的面形误差值和均方根值;依据CMM的测量结果,完成了对离轴非球面镜精磨阶段的加工,解决了目前离轴非球面镜精磨阶段难于检测,以至于无法加工的问题。随着离轴非球面镜顺利进入抛光阶段,使用CMM实现了离轴非球面镜精磨检测与抛光检测的无缝对接。A method was proposed to measure off-axis aspherieal mirrors by a coordinate measurement machine （CMM）. The 3D coordinates of the actual points on the off-axis mirrors were obtained with this method, and were compared with the data by the theoretical model, through which the profile errors and root-mean-square values of the actual mirrors were obtained. All the fine grinding processes were guided according to the measurement results. Thus the problem that off-axis mirrors are difficult to measure and manufacture is resolved. As the off-axis mirror came into the polishing process successfully, the measurement of off-axis aspherical mirrors in the grinding process was successfully followed by that in the polishing process.

关 键 词：离轴非球面镜 三坐标测量机 面形误差 精磨 

分 类 号：O439[机械工程—光学工程]