激光刻蚀实现介质谐振器参数微调的研究  

Research of the Small Adjusting Parameter for Dielectric Resonator with Laser Etching Technology

作　　者：陈赐海[1] 

机构地区：[1]漳州师范学院物理与电子信息工程系,福建漳州363000

出　　处：《压电与声光》2012年第5期720-723,共4页Piezoelectrics & Acoustooptics

基　　金：福建省自然科学基金资助项目(2008J0036)

摘　　要：研究提出激光刻蚀加工技术的新方法,实现微波陶瓷介质谐振器的参数微调。首先运用电磁理论推导求解本征值问题的有限元法,利用该方法验证了机械调节谐振器参数存在的缺点,重点研究激光刻蚀微调操作中存在的几种影响因素,获得激光微调参数与谐振频率改变量的关系式。最后用自制相对频率误差小于0.2%的微波介质谐振器验证了激光刻蚀法微调的优势。In this paper,a new method of the laser etching technology was proposed for the small adjusting parameter of the microwave dielectric ceramics resonator.The FEM for solving the eigenvalue problem was firstly deduced by electromagnetic theory,meanwhile,the shortcomings of the mechanical adjustment resonator parameter was verified with the FEM.Several factors affecting laser etching operation were mainly explored.The relationship between laser etching parameters and resonant frequency variation was obtained through experiments.Finally,the advantage of laser etching technology was verified with self-made dielectric resonator,which its relative frequency error was less than 0.2%.

关 键 词：介质谐振器 有限元法 激光刻蚀 谐振频率 参数微调 

分 类 号：TQ174[化学工程—陶瓷工业]