MEMS压阻超声传感器的设计与优化  

Designing of MEMS Piezoresistive Ultra Acoustic Transducer

作　　者：宛克敬[1] 何常德[1] 廉德钦[1] 薛晨阳[1] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《压电与声光》2012年第5期728-731,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然基金仪器专项基金资助项目(61127008)

摘　　要：提出了一种新的压阻式超声传感器结构,该结构由主振梁和微传感梁组成,在声压的作用下,主振梁振动从而带动微传感梁的振动。通过有限元软件Ansys仿真分析该结构的灵敏度,并与悬臂梁结构压阻式声传感器相比,结果表明灵敏度有了一定的提高。为了实现结构的优化,仿真了结构的尺寸与共振频率的关系,对相同共振频率的结构进行了静力分析,计算并对比了不同尺寸结构的灵敏度,从而得到灵敏度最高的结构,实现了结构的优化。A novel structure for piezo-resistive ultrasonic transducer is introduced,which consists of main vibrate cantilever and mini sensing cantilever.The main cantilever vibrates under acoustic pressure and drives vibration of mini cantilever.Sensitivity has been analysis by Ansys.Result shows that the sensitivity of mini cantilever has been improved compared with piezo-resistance cantilever.To optimize the structure,relation between structure size and resonant frequency has been simulated.Static analysis on the mini cantilever with same resonant frequency has carried on.Sensitivities of different size mini cantilevers are calculated and compared to get the best sensitivity structure,and to accomplish optimization of the structure.

关 键 词：压阻 超声传感器 微传感梁结构 ANSYS 优化 

分 类 号：TN552[电子电信]