SrTiO_3薄膜制备技术研究进展  

Research Development on Preparation of SrTiO_3 Thin Film

作　　者：刘剑[1] 郝斌[1] 董秀珍[1] 李悦[1] 王伟志[2] 

机构地区：[1]唐山学院环境与化学工程系,唐山063000 [2]唐山学院计算机科学与技术系,唐山063000

出　　处：《硅酸盐通报》2012年第5期1185-1189,共5页Bulletin of the Chinese Ceramic Society

基　　金：唐山市科学技术研究与发展指导计划项目(No.11110214a);唐山学院科研项目(No.11001B)

摘　　要：拥有众多优良性能的SrTiO3薄膜已经受到了人们的广泛关注。本文首先对SrTiO3薄膜的性质和应用进行了简单介绍,然后从物理和化学两大类方法着重对其现有制备技术及研究进展进行了全面的综述,文章最后对SrTiO3薄膜的制备及器件研究领域进行了展望。SrTiO3 thin film has been paid more attention for its excellent capability. Properties and application of SrTiO3 thin film were introduced firstly, then the preparation technic and research actuality with physical and chemical method were summarized in detail, at last the prospect of research field of SrTiO3 thin film preparation and organ was put forward.

关 键 词：SRTIO3薄膜 制备 进展 

分 类 号：O484[理学—固体物理]