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作 者:宋雷[1] 岳慧敏[1] 吴雨祥[1] 刘永[1] 刘永智[1]
机构地区:[1]电子科技大学光电信息学院,四川成都610054
出 处:《光电子.激光》2012年第11期2154-2162,共9页Journal of Optoelectronics·Laser
基 金:中央高校基本科研业务费(ZYGX2011J053)资助项目
摘 要:对基于条纹反射的镜面物体三维形貌测量进行了研究,测量并分析了镜面手机外壳不同横向空间分辨率的三维形貌。由计算机控制液晶显示屏生成正弦条纹图像,用CCD相机记录由待测镜面物体反射的变形条纹图像并进行相位解调。相位分布受物体表面梯度调制,对相位数据进一步求导和积分可以分别得到表面曲率和高度分布。通过带通滤波分析,可以分解得到样品不同横向空间尺度的三维形貌,为加工工艺改进提供定量依据。对镜面手机外壳的测量结果表明,本文方法具有很高的灵敏度和很大的动态范围,高度方向分辨率可达亚μm量级。在普通实验条件下,能够同时得到表面形状缺陷、喷漆质量以及微观痕迹的定量数据;曲率分布数据特别适合于对任意形状镜面物体表面形貌瑕疵的检测定位。Fringe reflection method for 3D shape measurement of specular object has been investigated. The surface profile of specular cell phone cases is measured and analyzed on variable lateral scales. A computer-generated sinusoidal fringe is displayed on a liquid crystal display monitor. A CCD camera is used to observe and record the distorted fringe reflected via the tested specular surface. The phase distri- bution modulated by the surface gradient is restored then. Curvature map and height map are calculated by further derivation and integration of the phase value. Topography on variable lateral scales extracted by bandpass filtering is helpful for the improvement of manufacturing process. Experimental results of specular cell phone cases show a rather high sensitivity and large dynamic range of this technique. The capability of achieving mierostructures under a few submicrons in height direction is demonstrated. De- fects,quality of lacquer surfaces and microstructures can be obtained simultaneously in modest experi mental conditions by making analysis on different Iateral scales. And the curvature map is applicable for the detection and localization of defects on free-form specular surface.
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