一种新型机械零件表面形貌测量仪的研究  

Study of the measurement techniques of metal surface morphology

作　　者：申龙章[1] 樊瑜瑾[1] 

机构地区：[1]昆明理工大学机电工程学院,昆明650093

出　　处：《工业仪表与自动化装置》2012年第5期95-97,共3页Industrial Instrumentation & Automation

基　　金：昆明理工大学2012年学生课外学术科技创新基金(2012YB043)

摘　　要：介绍了基于象散法的激光自动聚焦原理,论证了利用该原理在金属表面微位移测量技术中的应用,可通过对自动聚焦伺服系统各信号的控制来进行表面形貌的测量。研究并开发了一台基于已有光驱激光头及其伺服电路的经济型三坐标测量仪,使用步进电机带动丝杠传动实现X、Y轴的进给,通过改变步进电机驱动器细分数改变进给步长,读取聚焦良好时音圈电机的加载电压作为该点的Z坐标值。This paper presented the principle of the laser auto - focusing based on the astigmatic method, expounded the application in the metal surface micro -displacement measurement technology by using the principle. The measurement of surface morphology could through to the automatic focus servo system of each signal control. Researched and developed a low - cost and pricision three - coordinate measuring machine based on CD - ROM existing mature servo circuit and laser pick - up head, used step motors guide screw to achieve the feeding of X, Y axis. Throughed altering the fine points of the stepping motor drive to change the step size, read the voltage value load at the voice coil motor as the value of Z coordinates since the focuse movement.

关 键 词：测量 自动聚焦 微位移测量 光驱激光头 

分 类 号：TH742[机械工程—光学工程] TN247[机械工程—仪器科学与技术]