基于像散原理的并行共焦检测的微形貌参数的可视化测量  

Visualization measurements of the morphology parameters in a parallel confocal system based on astigmatism method

作　　者：赵晶晶[1] 刘文文[1] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,安徽合肥230009

出　　处：《光学仪器》2012年第5期5-10,共6页Optical Instruments

基　　金：国家自然科学基金资助项目(50775063)

摘　　要：为实现对微结构表面轮廓参数的精确测量,用基于像散原理的并行共焦检测系统获取微结构表面的三维信息,进而实现对微结构表面参数的可视化测量。考虑到微结构表面特点,采用累加弦长双三次样条插值曲面对其表面进行重构。并选择高的插值细分倍率获得连续光顺廓形表面,通过拾取拟合曲面上的点而不是廓形局部三角面片上的点实现三维廓形参数评定。由重构曲面模拟结果显示:累加弦长双三次样条重构微结构表面可以有效地实现对微结构表面参数的精确测量。To achieve accurate measurement of surface profile parameters on the microstructure,the three-dimensional information of the microstructure surface is obtained and the visualization measurement of the microstructure surface parameters is achieved in a parallel confocal system based on the astigmatism method.Combined with the characteristics of the microstructure surface,the cumulative chord length bicubic-spline interpolation curve surface fitting method is used to reconstruct the microstructure surface.High subdivision accuracy is selected to obtained the 3-D surface profiles reconstructed.The 3-D surface profile parameters are evaluated based on the points picked from the cumulative chord length bicubic-spline interpolation curve surface rather than from the local triangular plane in the 3-D surface profile.Analog reconstruction theory of surface data results show that the cumulative chord length bicubic spline reconstruction of micro-structured surface can effectively achieve the accurate measurement of the microstructure surface parameters.

关 键 词：微结构检测 表面重构 可视化测量 累加弦长双三次样条 

分 类 号：TH740.6[机械工程—光学工程]