质子注入能量对垂直腔面发射激光器的阈值和功率的影响  

The effects of proton implant energy on threshold and output power of vertical cavity surface emitting laser

作　　者：毛明明[1] 徐晨[1] 魏思民[1] 解意洋[1] 刘久澄[1] 许坤[1] 

机构地区：[1]北京工业大学光电子技术实验室,北京100124

出　　处：《物理学报》2012年第21期249-252,I0003,共5页Acta Physica Sinica

基　　金：国家高技术研究发展计划(批准号:2008AA03Z402);国家自然科学基金(批准号:61076044);北京市自然科学基金(批准号:4092007;4102003;4112006)资助的课题~~

摘　　要：文章研究了如何兼顾质子注入型垂直腔面发射激光器的功率和阈值性能.从模拟和实验两方面分析了质子注入能量与器件功率和阈值特性的关系.发现注入能量过高时,损伤有源区,降低了功率性能.而能量过低则会减弱对注入电流的限制,增加阈值.计算和实验结果表明,对于文中的器件结构,315 keV的注入能量是合适的.在10μm的注入孔径下获得器件的阈值为4.3 mA,功率为1.7 mW.A method of balancing the output power and threshold current property of vertical cavity surface emitting laser is studied. The relationship between proton implantation energy and device performance is analyzed by simulation and experiment. It is found that a higher injection energy can destroy the active region, thus reducing the output power property. The threshold current will be increased since a lower injection energy may weaken the restriction on the injection current. The results indicate that 315 keV injection energy is the right choice for our device structure. The output power and threshold current obtained under 10 μm aperture are 1.7 mW and 4.3 mW, respectively.

关 键 词：质子注入能量 垂直腔面发射激光器 功率 阈值 

分 类 号：TN248[电子电信—物理电子学]