分离靶多弧离子镀Nb-Al合金薄膜及其热腐蚀行为  

Study on Black Coating That Prepared by Ion-plating Mehtod Instead of the Process of Phosphatizing and/or Anodizing

作　　者：张扬伟[1] 王秀兰 李德俊[1] 王富岗[1] 林国强[2] 

机构地区：[1]大连理工大学材料工程系,大连116024 [2]大连理工大学三束材料改性国家重点实验室,大连116024

出　　处：《表面技术》2000年第4期18-20,共3页Surface Technology

摘　　要：采用分离靶多弧离子镀技术，通过改变基片负偏压和分离靶弧电流 以及镀膜时间等参数，在３１０ＳＳ（ｓｔａｉｎｌｅｓｓ ｓｔｅｅｌ）基片上制备了多种成分的 Ｎｂ１－ｘＡｌｘ （０．３８＜ｘ＜０．６４）合金薄膜。结果表明，选择适当的基片负偏压和分离靶弧电流可 制得所需成分的二元合金薄膜。对所制备的Ｎｂ１－ｘＡｌｘ薄膜，分别做了６００℃、９００℃ 的热腐蚀实验（低温热腐蚀和高温热腐蚀），热腐蚀实验表明，该薄膜具有较好的抗In this paper, the method of multi-arc ion plating with separate targets was used to deposit Nb-Al films on the 310ss (stainless steel)by changing negative bias voltage of substrate, current of separate targets and film depositin time. The experimental results showed that it is available to deposit the binary alloy films by selecting suitable negative bias voltage of substrate and current of separate targets. In addition, the hot corrosion behavior of Nb-Al films with coating Na2SO4 at 600℃ and 900℃ has been investigated, respectively. The results indicated that the performance of Nb-Al films is better than its substance 310ss in hot corrosion.

关 键 词：多弧离子散 分离靶 薄膜 热腐蚀 钕铝合金 

分 类 号：TG174.442[金属学及工艺—金属表面处理]