基于AFM的微纳米结构力学特性测量  

Mechanical Measurement of Microstructure and Nano-structure Based on Atomic Force Microscopy

作　　者：朱纪军[1] 王静[1] 赵冰[1] 沈耀春[1] 顾宁[1] 

机构地区：[1]东南大学分子与生物分子电子学开放实验室,南京210096

出　　处：《微细加工技术》2000年第2期55-61,共7页Microfabrication Technology

基　　金：江苏省自然科学基金项目(BK99006)

摘　　要：原子力显微镜 (AFM)以其优异的特性不仅在微米、纳米的范围内获取图象 ,同时可以获取针尖与样品之间的作用力 ,为研究样品的力学性能提供了新思路。对AFM在力学测量上的原理和应用进行了综述 ,并提出基于AFM的生物样品的力学测量的新方法。Atomic force microscopy has not only revealed topographic images of surfaces with namometer ?scale resolution,but also has generated force images to measure the interaction between tip and the surface.Thus it becomes a new method for studying the mechanical properties of the sample.In this paper,A review is given about the mechanism and application of mechanical measurement by AFM and at the same time a new method for bio?material samples is put forward.

关 键 词：原子力显微镜 扫描力显微量 力学测量 力量特性 生物样品 

分 类 号：TB383[一般工业技术—材料科学与工程]