SiC陶瓷密封环端面流体动压槽的激光加工  

Study on Laser Processing Technique of Sic Ceramic Ring Seal End Surface Fluid Dynamic Grooves

作　　者：张珊[1] 温劲苇[1] 

机构地区：[1]天津市激光技术研究所,天津300192

出　　处：《应用激光》2000年第4期175-178,184,共5页Applied Laser

基　　金：天津市自然科学基金资助

摘　　要：用 Si C陶瓷作密封环 ,并在其端面上开设流体动压槽 ,可满足高 PV值工业设备对轴密封的要求。本文研究激光打标工艺对动压槽参数的影响 ,加工出合格的陶瓷密封环端面动压槽。Using SiC ceramic ring seal and making some fluid dynamic grooves on its end surface, will satisfy the requirement to the shafting seal in high PV value industrial equipment. In this article, we sudied the main technological processing conditions of laser marking which may effect the dynamic groove parameters. We have made some qualified ceramic ring seal end surface dynamic grooves.

关 键 词：SIC陶瓷 密封环 动压槽 激光加工 

分 类 号：TN304.24[电子电信—物理电子学]