石英陀螺闭环自激驱动电路(英文)  

A Closed-Loop Self-Excited Drive Circuit for Quartz Gyroscope

作　　者：王庆一[1] 陈伟平[1,2] 尹亮[1] 刘晓为[1,2] 周治平[1] 

机构地区：[1]哈尔滨工业大学微电子科学与技术系,哈尔滨150001 [2]微系统与微结构制造教育部重点实验室,哈尔滨150001

出　　处：《纳米技术与精密工程》2012年第6期497-502,共6页Nanotechnology and Precision Engineering

基　　金：国家重点基础研究发展计划(973计划)资助项目(2012CB934104)

摘　　要：为使石英陀螺满足高性能、小型化和集成化需求,设计石英陀螺专用集成电路接口芯片势在必行.本文通过分析石英陀螺表头的机电特性,得出方波驱动方式是系统性能和复杂程度的折衷.据此设计了一种闭环自激驱动电路.该电路与石英结构形成反馈环路,从而实现陀螺的自激驱动,并通过自动增益控制电路实现幅值稳定.该电路已用0.5μm CMOS工艺实现,测试结果表明该电路可以实现稳幅稳频的驱动,幅值稳定度0.01%.集成该驱动电路的石英陀螺系统达到战术级性能.In order to satisfy the requirement of high performance, miniaturization and integration for quartz gyroscope, design of the application-specific integrated circuit （ASIC） interface chip is the trend. In this paper, it is derived that a square wave drive mode is the tradeoff of system performance and complexity based on the analysis of electrical and mechanical characteristics of the element. A closed-loop self-excited drive circuit is designed based on the above conclusion. This circuit together with the quartz element comprise the closed-loop that achieves the self-excited oscillation, and an automatic gain control module maintains the stability of the vibration amplitude. The closedoop self-excited drive circuit is realized in a 0.5 μm CMOS process. The test results show that the designed circuit accomplishes a drive signal with stable amplitude and frequency, with the amplitude stability of 0.01%. The performance of the quartz gyroscope integrated with this circuit can satisfy the tactical requirement.

关 键 词：石英陀螺 专用集成电路 驱动电路 

分 类 号：TN492[电子电信—微电子学与固体电子学]