基于悬浮薄膜堆叠式结构的微气体传感器设计  

Design of suspended-membrance stacking-type structure micro gas sensor

作　　者：朱思敏[1] 谭秋林[1] 裴向东[1] 熊继军[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《传感器与微系统》2012年第11期94-96,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(51275491);山西省自然科学基金资助项目(2012021013-4)

摘　　要：本文基于MEMS工艺所设计的气体传感器,克服了以往同类传感器响应时间长,读取数据量小,功耗大等缺点。由于温度作为气体传感器的一个重要工作条件,其敏感薄膜上温度的均衡度直接影响气体传感器的工作性能。该传感器采用悬浮薄膜式堆叠结构,堆叠层主要包含硅基底、隔离层、加热电极、绝缘层以及敏感薄膜。这样的结构设计是为了形成热隔离真空腔,真空环境可以有效降低温度瞬变对敏感薄膜的影响。利用ANSYS软件建立该结构建模,并对其进行温度仿真后发现该结构符合预期的理论分析,其响应时间缩短,拾取的数据量大幅增加,同时功耗有效降低。The designed gas sensors based on MEMS technology has overcome the disadvantage of previous gas sensors,such as long response time,small quantity of read-out datas and high power consumption.As temperature is one of the important working conditions for gas sensor,the balance of the temperature on sensitive film directly influences the working performance of gas sensor.The designed structure is suspended-membrance stacking-type,and it mainly includes silicon substrate,isolation layer,heating electrode,insulation layer,as well as sensitive film.In order to form a thermal isolation vacuum cavity,and it can effectively reduce the effect of temperature transients on sensitive film.After making use of ANSYS software to build the structure modeling and temperature simulation,it is found that such kind of structure design can reduce the power consumption efficiently,and shorten the respond time,the read-out data quantity also grow much more than before.

关 键 词：微气体传感器 悬浮薄膜堆叠式 ANSYS 结构设计 温度仿真 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]