掺He钛膜中He泡的演化研究  

Study of the evolution of helium bubbles in helium-containing titanium films

作　　者：王康[1] 邓爱红[1,2] 刘莉[3] 李悦[1] 周宇璐[2] 侯氢[2] 周冰[1] 王珊玲[4] 

机构地区：[1]四川大学物理科学与技术学院物理系,成都610064 [2]四川大学原子核科学技术研究所,辐射物理及技术教育部重点实验室,成都610064 [3]西南民族大学计算机科学与技术学院,成都610041 [4]四川大学分析测试中心,成都610064

出　　处：《物理学报》2012年第22期366-371,共6页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:10775102)资助的课题~~

摘　　要：本文利用慢正电子束分析(SPBA)和透射电子显微镜(TEM)方法研究了钛膜内He相关缺陷的演化.实验结果表明:室温下,钛膜中的He主要形成均匀的小He泡.随着He浓度的增大,He泡的密度相应地增加.在973K高温退火后,在含高浓度He的钛膜样品中观测到大He泡的出现.实验结果表明迁移合并和较大He泡周围的级联融合共同作用导致了大He泡的形成.In this paper, the evolution of the He-related defects in the titanium film is experimentally investigated by combining slow positron beam analysis （SPBA） and transmission electron microscope （TEM） technique. The results indicate that small bubbles in the titanium film distribute uniformly at room temperature. With the increment of He concentration, the density of He bubbles in the sample increases correspondingly. Large bubbles are observed in the titanium film containing high He concentration after 973 K high temperature annealing, and it is found that both migration-coalescence and cascade-coalescence around the bigger He bubbles lead to the rapid growth of He bubbles.

关 键 词：He泡 钛膜 慢正电子束 级联融合 

分 类 号：O484[理学—固体物理]