组合套镀法制备2.0～2.4 μm波段8通道微型集成滤光片  

Fabrication of 8-Channel Micro Integrated Filter in 2.0-2.4 μm by Combine Masks and Plating

作　　者：罗海瀚[1] 李耀鹏[1] 蔡清元[1] 刘定权[1] 

机构地区：[1]中国科学院上海技术物理研究所,上海200083

出　　处：《中国激光》2012年第11期87-91,共5页Chinese Journal of Lasers

摘　　要：利用组合套镀法布里-珀罗结构光学薄膜滤光片间隔层的方法,选取锗和一氧化硅分别作为高低折射率膜层材料,在短波红外区域2.0～2.4μm光谱范围内,设计并制备了8通道集成窄带滤光片,单个光谱通道的有效通光区域的宽度为450μm,其间有30μm的挡光过渡带。各通道的峰值光谱透射率大于65%,滤光片的半峰全宽为8～13nm,相对带宽在0.33%～0.65%之间。Using the method to combine masks and plating the spacer layer of the Fabry-Perot filter, germanium and silicon oxide are selected as the high and low index coating materials, 8-channel integrated filter is designed and fabricated with an effective light-transmitting width of 450 μm separated by a block of 30 μm for each channel in the spectral regions of 2.0-2.4 μm. For each channel, the maximum transmittance is greater than 65 %, the full width at half maximum （FWHM） is 8- 13 nm, as well as, the relative bandwidth is between 0.33 - 0.65 %.

关 键 词：薄膜 光学薄膜 集成滤光片 间隔层 组合套镀 

分 类 号：O484.4[理学—固体物理]