Si添加对TiN涂层微结构、力学及抗氧化性能的影响  

Effect of Si Addition on Microstructure,Mechanical Properties and Oxidation Resistance of TiN Coating

作　　者：李竞荣[1,2] 刘慧君 裴斐 陈利[1,2,3] 

机构地区：[1]株洲钻石切削刀具股份有限公司,湖南株洲412007 [2]硬质合金国家重点实验室,湖南株洲412000 [3]中南大学粉末冶金国家重点实验室,湖南株洲410083

出　　处：《硬质合金》2012年第5期279-282,共4页Cemented Carbides

基　　金：高档数控机床与基础制造设备(2009ZX04012-031)

摘　　要：借助EDX、XRD、SEM及纳米压痕研究了采用磁控溅射技术制备的TiN和Ti-Si-N涂层的微观组织结构和力学性能。研究表明:TiN和Ti-Si-N涂层均呈面心立方结构,Si元素的加入使TiN涂层的组织形貌由柱状晶结构转变为Si3N4界面相包裹纳米晶TiN的纳米晶复合结构;由于界面强化效应,Si的加入使涂层的硬度显著增加;涂层的应力也随着Si元素的加入而增加;Si的加入使TiN涂层的抗氧性得到明显改善。Microstructure and mechanical properties of Ti-N and Ti-Si-N coatings deposited on cemented carbide by magnetron sputtering had been characterized via EDX, XRD, SEM, and nano-indentation. Results show that all coatings exhibit face-centered cubic structure. With the incorporation of Si, TiN coatings transform from columnar structure into nanocomposite structure, where Si3N4 boundary layers encapsulate nanocrystalline TiN grains. Incorporation of Si into TiN results in an increase in hardness due to interface strength, and also an elevated stress. Additionally, Si alloying improves significantly the oxidation resistance of TiN.

关 键 词：TI-SI-N 纳米晶复合结构 硬度 应力 抗氧化性能 

分 类 号：TG174.44[金属学及工艺—金属表面处理]