高功率激光系统金属表面颗粒污染物负压吸取采样方法研究  

Collecting Contaminant Particles from Metal Surfaces in High Power Laser System by Micro-Vacuum Sampling

作　　者：王春勇[1] 李丹明[1] 叶自煜[1] 贾连军[1] 

机构地区：[1]兰州空间技术物理研究所,兰州730000

出　　处：《真空科学与技术学报》2012年第11期1038-1041,共4页Chinese Journal of Vacuum Science and Technology

摘　　要：针对高功率激光系统中光滑金属表面颗粒污染物采样与分析的要求,提出了一种用负压吸取的方式采集金属表面颗粒污染物的方法。通过理论计算分析了负压吸取法的可行性,设计了采样效率评估试验,试验结果表明该方法对于高功率激光系统中光滑金属表面颗粒物的采样具有很好的适用性。A novel technique has been successfully developed to collect and characterize the physisorbed contaminant particles from the very smooth metal surfaces in the high power laser system.The feasibility of the micro vacuum sampling was theoretically studied;the testing methods to evaluate the sampling efficiency were designed and performed;and the filtering films,before and after the micro vacuum sampling of the contaminants particle,were characterized with scanning electron microscopy,and optical microscope.The impact of the temperature on the sampling efficiency was tentatively discussed.The results show that the micro vacuum sampling is capable of collecting the physisorbed,particulate contaminants from the metal surfaces in the high power laser system.

关 键 词：高功率激光系统 光滑金属表面 颗粒污染物采样 负压采样法 

分 类 号：TB774.3[一般工业技术—真空技术]