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机构地区:[1]四川大学光电科学技术系,四川成都610064
出 处:《光电子.激光》2012年第12期2362-2367,共6页Journal of Optoelectronics·Laser
基 金:国家"863"高技术研究发展计划(2007AA01Z333);国家重大专项(2009ZX02204-008);四川省学术和技术带头人培养基金(07GRC-01)资助项目
摘 要:针对复合光傅里叶变换轮廓术(CFTP)对于陡变物体其单一的调制频率难以满足相位展开与解相精度对频率的不同要求,提出一种包含两个调制频率的复合光栅投影方法。与CFTP相比,本文方法用低频指导高频进行相位展开提高解相精度,相邻两载波通道间交流分量的频谱混叠程度明显降低,并且同样达到π相移技术将测量范围扩大3倍的效果。模拟和实验均验证了本文方法的有效性。The composite Fourier transform profilometry (CFTP) has enlarged the measuring range by three times by using of the phase-shifting technique. When it is used to measure the discontinuous object,the single modulation frequency can't satisfy the different frequencies requirement for phase unwrapping and phase calculation accuracy. A dual-frequency composite grating which contains two modulation frequencies is proposed in this paper. Compared with the CFTP, the phase calculation accuracy is improved because the lower frequency is used to guide the unwrapping process of the higher frequency; the overlapping degree of Fourier spectrum between the AC components in the adjacent carrier channels is lowered; the measuring range is enlarged three times as the n shifting technique is used. Both numerical simulation and experiment have verified the feasibility and validity of the proposed method.
关 键 词:复合光傅里叶变换轮廓术(CFTP) 双频复合光栅 解相精度 频谱混叠 测量范围
分 类 号:TN247[电子电信—物理电子学]
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