射频激励CO_2波导激光器的放电技术  

Discharge of RF excited CO_2 Waveguide Laser

作　　者：朱钧[1] 杨风雷[2] 范希智[1] 陈钰清[1] 王静环 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,杭州310027 [2]中国计量学院信息工程系,杭州310034

出　　处：《真空科学与技术》2000年第4期290-292,共3页Vacuum Science and Technology

摘　　要：在射频激励CO2 波导激光器的研制中 ,关键技术是如何使射频电源的能量能最大限度地输入到激光放电区中以及在放电区均匀放电。本文在理论上详细论述了如何在激光头的射频电极上并联上一些电感 ,并在激光头和电源之间加一可调匹配网络以达到这一目的 ,并在实验上实现了矩形波导以及 1× 3和 2× 3波导列阵大面积的均匀放电 。Research efforts in developing CO 2 waveguide laser have been centered on two key problems:one is how to input RF energy into the discharge area with maximum efficiency;the other is how to ensure a uniform discharge.A discharge model of the laser head was deve loped to theoretically analyze the discharge mechanism.We found that these two problems can be solved by parallel connecting some inductors to the laser head and by adjusting the impedance of the matching circuit between the laser head and the RF source.With these techinques,uniform discharge in rectangular waveguides,1×3,and 2×3 arrays waveguides has been successfully achieved.

关 键 词：射频激励 阻抗匹配 二氧化碳波导激光器 放电 

分 类 号：TN248.22[电子电信—物理电子学]