基于光学相干层析成像系统的表面形貌测量研究  

Surface topography measurement based on optical coherence tomography

作　　者：秦玉伟[1] 

机构地区：[1]渭南师范学院物理与电气工程学院,陕西渭南714000

出　　处：《激光杂志》2012年第6期32-33,共2页Laser Journal

基　　金：国家自然科学基金资助项目(50975228);渭南市自然科学基础研究计划项目(2011KYJ-3);渭南师范学院科研计划项目(12YKS021)

摘　　要：提出了一种基于光学相干层析成像的表面形貌测量方法,利用白光频谱域光学相干层,析系统对普通平面镜样品进行成像,对不同光程差对应的干涉光谱进行了测量,并分析了不同光程差对应的散射势峰值的位置,最终得到了平面镜样品的二维层析图像。实验结果可知,该系统可完成对物体表面形貌的测量,具有成像速度高、信噪比高和分辨率高的优点,可满足实际工业测量需要。A method for surface tomography measurement was introduced. White - light spectral - domain optical coherence tomography was used for the mirror sample imaging. The interference spectrum were measured with different optical path difference, the scattering potential peaks with different optical path difference were also analyzed. Atwo - dimensional cross - sectional image was finally obtained. The experiment shows that system can measure the surface tomography of the object. It has high imaging speed, high signal - to- noise and resolution, can face the industrial measurement.

关 键 词：光学相干层析成像 形貌测量 轴向分辨率 

分 类 号：O439[机械工程—光学工程]