基于MEMS技术的便携式近红外光谱仪的研制  

Design of MEMS-based Portable Near-infrared Spectrometer

作　　者：胡方强[1] 李晟 

机构地区：[1]南京工业大学电子与信息工程学院,江苏南京210009 [2]江苏英特神思科技有限公司,江苏南京210005

出　　处：《仪表技术》2012年第12期21-23,共3页Instrumentation Technology

摘　　要：介绍基于MEMS技术的先进微小型近红外光谱仪的工作原理,提出了基于MEMS微镜的新型近红外光谱仪的设计,包括光路原理、硬件电路组成及软件模块,给出针对自来水样品的测量光谱图,其轻便灵活、低功耗及超高性价比填补了国内空白。This paper introduces the work mechanism of the leading-edge MEMS-based near-infrared spectrometer and presents the design of a novel micro-mirror-based near-infrared spectrometer,covering the optical path configuration,circuit design and software.It also shows the measured spectrums of tap water samples.As the first one in China,this MEMS-based spectrometer has the advantages of portability,low-power consumption,and good price-performance ratio.

关 键 词：近红外光谱仪 MEMS微镜 AT91SAM7S64 

分 类 号：TN215[电子电信—物理电子学]