高g值压阻加速度计动态特性与阻尼的关系研究  

Relationship between Damping and Dynamic Characteristics of High-g Piezoresistive Accelerometer

作　　者：刘爱莉[1] 范锦彪[1] 张茹开[1] 王永芳[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《传感技术学报》2012年第9期1246-1250,共5页Chinese Journal of Sensors and Actuators

基　　金：山西省青年科技研究基金项目(2008021015)

摘　　要：为了避免高g值压阻加速度计在工作过程中出现结构易损坏、响应信号精准度低的问题,需要在设计过程中合理调整阻尼参数。基于高g值传感器固有频率高、上升时间短两个特性,通过建模仿真从时域和频域两方面分析了阻尼对传感器动态响应特性的影响。得出阻尼比范围在0.10～0.25时高g值压阻加速度计动态特性较好,并通过实验验证了仿真分析的正确性,为设计过程中阻尼参数的调整提供了重要依据。In order to avoid the problem that the structure of the high-g piezoresistive accelerometer is easily damaged in the course of using,and the accuracy of the response signal can ＇ t be ensured,it is important to adjust the damping value rationally.Based on the high natural frequency and short rise-time of high-g accelerometer,this paper analyzes the influence of damping on dynamic characteristics of accelerometer in time and frequency domain through modeling and simulation.A rational damping range obtained is from 0.1 to 0.25,within which the high-g piezoresistive accelerometer has good dynamic characteristics.The correctness of the result that provides reference for adjusting the damping value is proved by experiment.

关 键 词：高g值加速度计 阻尼 建模仿真 压阻式 动态特性 

分 类 号：TH824[机械工程—仪器科学与技术]