ICF靶丸装配误差检测  

Assembly error inspection of ICF micro-capsule

作　　者：费致根[1] 徐小洁[2] 郭俊杰[3] 

机构地区：[1]郑州轻工业学院机电学院,郑州450002 [2]河南理工大学理化学院,河南焦作454000 [3]西安交通大学机械制造系统工程国家重点实验室,西安710049

出　　处：《强激光与粒子束》2013年第1期62-66,共5页High Power Laser and Particle Beams

基　　金：郑州轻工业学院博士科研基金项目;郑州市科技攻关基金项目

摘　　要：针对激光惯性约束聚变装置中靶丸装配误差检测困难、要求精度高的特点,研制了一套用于微靶装配参数检测的测量系统。提出了一种基于激光与CCD的复合式测量方法,建立了二者数据融合的数学模型,通过标定空间位置关系有效地把二者的测量数据融合到同一个坐标系中,从而实现了高精度三维测量。分两种情况讨论了靶丸装配误差的检测方法。实验结果验证了这两种方法的可行性,并比较了两种方法的测量精度,其极限测量误差均不超过3μm。Aiming at the difficulties and high-precision detection demand for assembly error inspection of micro-capsule in inertial confinement fusion（ICF） device, the measurement system for assembly parameters detection of laser target is developed. A compound measuring method based on laser probe and CCD is proposed. The mathematical model for data fusion of the compound probe is established by calibrating their spatial location relationship. Thus, high-precision 3D inspection is realized. The in- spection method of micro-capsule assembly error is discussed in two cases. The experimental results demonstrate the validity of these two approaches. Furthermore, the measurement precision of such two approaches is compared and their limit errors are both within 3 μm.

关 键 词：ICF靶丸 装配误差检测 复合式测量 五轴测量系统 

分 类 号：TG839[金属学及工艺—公差测量技术]