金属杂质粒子诱导薄膜的损伤机理研究  

The Mechanism of Laser Induced Damage to Film by Metal Impurity Particle

作　　者：张秋慧[1] 冯国英[2] 李娜[1] 韩敬华[2] 

机构地区：[1]河南工程学院电气信息工程系,河南郑州451191 [2]四川大学电子信息学院,四川成都610065

出　　处：《光谱学与光谱分析》2013年第1期159-162,共4页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金重大项目(60890203);国家自然科学基金面上项目(10976017)资助

摘　　要：薄膜内的杂质粒子极易诱导薄膜损伤,研究了金属粒子诱导HfO2薄膜损伤的特征,并基于金属粒子的热力学过程进行了分析。金属粒子对激光的强烈吸收将引起薄膜的熔化、气化以及电离,从而引起薄膜的剥离和脱落,形成圆状坑点;金属粒子对激光的吸收、热扩散以及热膨胀效应与其尺寸等密切相关;从温升规律分析,在相同激光能量辐照下,粒子大小引起的温升不同,从而形成大小不一的点坑状破坏点,且存在一个温升效应最强的粒径,最易引起薄膜的损伤;从金属粒子激光等离子体的辐射效应分析,金属粒子的辐射谱主要集中在紫外部分,辐射光子能量比入射激光光子能量强,具有更强的电离能力,从而加剧了薄膜的去除。The film can be easily damaged by impurity particles,and the damage characteristics of HfO2 film produced by metal particles and the corresponding thermodynamic process were studied.The strong absorption of laser light by metal particles can make film melt,gasified and ionized,and by this way,the film can be peeled and form tround pits point;The metal particle size is closely related to the processes of laser absorption,thermal diffusivity and thermal expansion closely related effects,etc.Under the same irritation energy,the temperature rise is determined by particle size,which can make different size of film damage pits.There is a certain size of metal particle which cause the highest temperature rise and make the film damage easily.Based on the analysis of irradiation ionization effects of laser plasma emission spectrum of the metal particles,the radiation spectrum is mainly focused on the ultraviolet part and photon energy is higher than the incident laser,which has stronger ionization effects,exacerbating the film removal.

关 键 词：激光诱导损伤 金属粒子 热力学效应 金属粒子等离子体 

分 类 号：O539[理学—等离子体物理] TN244[理学—物理]