粗光栅线位移测量系统细分误差补偿前后的精度分析  

Precision Analysis on Linear Encoder with Coarse Grating before and after Eliminating the Subdivision Error

作　　者：林鹏[1] 陈小强[1] 袁祥辉[1] 廖念钊[1] 

机构地区：[1]重庆大学国家教委光电技术及系统开放实验室,重庆400044

出　　处：《重庆师范学院学报（自然科学版）》2000年第3期6-11,共6页Journal of Chongqing Normal University(Natural Science Edition)

基　　金：重庆市应用基础研究基金资助

摘　　要：粗光栅线位移测量系统是一种优良的光电扫描绝对式线位移测量系统 ,可广泛用于机床自动化加工行业 ,但其较大的呈周期性变化的细分误差直接影响了系统的精度。本文针对系统的误差来源 ,利用其补偿电路 ,调节其本底噪声的大小 ,得到了细分误差与本底噪声对应关系的实验数据。通过一元线性回归分析 ,得出了细分误差与本底噪声的线性关系式 ,找到了系统修正误差时的理论依据。通过补偿使系统精度提高了一个数量级 ,达到了微米级精度。同时 ,对系统在细分误差补偿前后作了精度分析。The coarse grating linear encoder is a good type of phasemodulating linear displacement measuring system with optical scanning sersor. It has been widely used in machine tools. But its precision was limited by the sine form subdivision error. Having researched the error source of encoder system, the paper analyzed the experiment data of subdivision error and its related background noise by regulating the size of background noise in compensating circuit. Having analyzed with linear regression,the paper drew the linear relation between the subdivision error and background noise,which can be used as theoretical basis when amending errors. With error compensated, the system precision was improved near ten times, up to ±2μm. Meanwhile, the system precision has also been analyzed before and after the subdivision error was eliminated. [WT5HZ]

关 键 词：粗光栅 细分误差 精度分析 位移测量 

分 类 号：TH822[机械工程—仪器科学与技术]