Self-mixing interferometry based on nanometer fringes and polarization flipping  

作　　者：曾召利 张书练 朱守深 陈文学 李岩 

机构地区：[1]State Key Lab of Precision Measurement Technology and Instrument,Department of Precision Instruments,Tsinghua University

出　　处：《Chinese Optics Letters》2012年第12期45-47,共3页中国光学快报（英文版）

基　　金：supported by the Key Project of the National Natural Science Foundation of China (Nos.60827006 and 60723004);the Scientific and Technological Achievements Transformation and Industrialization Project by the Beijing Municipal Education Commission

摘　　要：Self-mixing interferometry （SMI） based on nanometer fringes and polarization flipping is realized. The in- terferometer comprises a single-mode He-Ne laser and a high-amplitude reflectivity feedback nfirror. The nanometer fringes are obtained by tilting the external feedback mirror. The fringe density is 35 times higher than that derived with conventional two-beam interference, and each fringe corresponds to a λ/70 displacement in external cavity length. Moreover, polarization flipping occurs when the external feedback mirror moves in the opposite direction. Such movement can be used to easily distinguish displacement direction. Experimental results show an optical resolution of displacement measurement of 9.04 nm with a range of 100 μm. The proposed placement and calibrating other SMI presents pronfising application micro-displacement sensors because prospects in precisely measuring dis- of its optical wavelength traceability.Self-mixing interferometry （SMI） based on nanometer fringes and polarization flipping is realized. The in- terferometer comprises a single-mode He-Ne laser and a high-amplitude reflectivity feedback nfirror. The nanometer fringes are obtained by tilting the external feedback mirror. The fringe density is 35 times higher than that derived with conventional two-beam interference, and each fringe corresponds to a λ/70 displacement in external cavity length. Moreover, polarization flipping occurs when the external feedback mirror moves in the opposite direction. Such movement can be used to easily distinguish displacement direction. Experimental results show an optical resolution of displacement measurement of 9.04 nm with a range of 100 μm. The proposed placement and calibrating other SMI presents pronfising application micro-displacement sensors because prospects in precisely measuring dis- of its optical wavelength traceability.

关 键 词：INTERFEROMETRY Mirrors Mixing POLARIZATION 

分 类 号：TN248[电子电信—物理电子学]