闭锁电热微开关的制备及性能测试  

The fabrication and performance test of latching electrothermal microswitch

作　　者：张颖 汪红 毛胜平 戴旭涵 丁桂甫[1,2] 

机构地区：[1]微米/纳米加工技术国家重点实验室,上海200240 [2]上海交通大学微纳科学技术研究院,上海200240

出　　处：《功能材料与器件学报》2012年第5期345-349,共5页Journal of Functional Materials and Devices

基　　金：上海市科委项目(11DZ2290203);国家自然基金(50977056)

摘　　要：本文主要介绍了一种闭锁电热微开关的制备及性能测试。利用双层膜电热微驱动器,基于双悬臂梁的结构设计,实现开关的驱动和闭锁。采用MEMS表面微加工技术完成所设计微开关器件的制备,并对其进行性能测试。结果表明,施加的脉冲电信号的最佳占空比为10%,并测得电阻丝能承受的最大功耗为90mW,单臂梁的翘曲高度为58μm,所得结果能够满足设计的闭锁电热微开关的工作需要。将本次设计的微开关连接到外接电路中,并施加时序双脉冲电信号,测得了外接电路的导通信号。This paper presents the fabrication and This microswitch consists of two cantilever beams performance test of latching electrothermal microswitch. using bimorph electrothermal actuator with mechanical latching. The microswitch is fabricated by MEMS surface micromachining technology, and then tested its performance. The results show that the suitable duty cycle of the applied pulse signal should be 10% , the maximum power consumption resistance endured is 90mW, and the bending displacement of the single beam can reach to 58p, m which can meet the designed demand. Finally, the latching electrothermal mi- croswitch can make the external circuit conduction.

关 键 词：电热驱动 机械锁定 MEMS微加工工艺 时序双脉冲电信号 

分 类 号：TM564[电气工程—电器]