基于ABAQUS的微结构滚压印仿真  

Simulation of Rolling Imprinting of Microstructure based on ABAQUS

作　　者：刘阳[1] 沈连婠[1] 叶回春[1] 李木军[1] 

机构地区：[1]中国科学技术大学,安徽合肥230027

出　　处：《新技术新工艺》2012年第12期6-9,共4页New Technology & New Process

基　　金：国家自然科学基金资助项目(50905173)

摘　　要：借助有限元软件ABAQUS,对滚动热压印成型过程进行二维仿真。聚合物材料采用PM-MA的理想弹塑性模型,以图形面积的复制率、图形的最大宽度和最大深度为评定判据,详细分析了滚子与聚合物表面距离、图案大小、图案占空比、滚子的滚动速度、聚合物弹性模量对压印图形质量及压印力的影响。仿真计算结果表明,滚子与聚合物的距离、图案占空比、聚合物的弹性模量对压印图形的质量影响较大,而滚子滚动速度以及图案大小对压印图形的质量影响较小;同时,滚子与聚合物距离、聚合物弹性模量、图案大小对压印力的影响较大,反之,其他的情况基本可以忽略。Based on the finite element method and the ABAQUS software, a 2D model of micro hot embossing process was simulated. The heat curable material PMMA wais employed in the simulation, which was modeled as an elastic perfect- ly-plastic material. The copying rate of the pattern,the maximum width and maximum depth of the copy pattern were taken as the evaluation criterions. Detailed analysis was made to investigate the influence of various factors, such as pattern size, pattern duty cycle, distance between roller and the polymer, scrolling speed, polymer elastic modulus to the imprinting quality and the imprint pressure. Simulation results showed that the distance between roller and the polymer, the pattern duty cycle and the polymer elastic modulus had impact on the imprinting process seriously. The influence of pattern size and scrolling speed on the embossing results can be ignored.

关 键 词：滚动压印 ABAQUS 有限元仿真 PMMA 

分 类 号：TH164[机械工程—机械制造及自动化]