一种用于高通量筛选传感器敏感材料的气敏材料筛选平台  

A Gas-sensing Material Screening Platform for High Throughput Screening Sensor Sensitive Material

作　　者：王小瑾[1] 张顺平[1] 张国柱[1] 

机构地区：[1]华中科技大学材料成型与模具技术国家重点实验室

出　　处：《电子技术（上海）》2012年第12期53-56,48,共5页Electronic Technology

基　　金：国家自然科学基金;编号50927201

摘　　要：设计并搭建了一个能够高通量表征材料气敏性能的测试平台。该测试平台具有高通量(36测试通道)、大的电阻测量范围(可测试500Ω-100MΩ,且测试误差小于5%)、控温准确(可精确至1℃)、界面友好等优点。以甲醛气体为样本,材料芯片由金属盐离子表面改性纳米SnO2制成,在该平台上进行测试。发现0.01mol/LCrCl3、0.02mol/LCrCl3、0.03mol/L CaCl2、0.03mol/L TiCl4掺杂的纳米SnO2材料在300℃条件下对甲醛有良好的响应。证实了该气敏材料测试平台用于高通量筛选材料的可行性。A high throughput test platform for material characterization of air sensitive performance is designed and established. The test platform has the advantages such as high throughput （36 test channels）, big resistance measurement range （being able to test 500 Ω-100mΩ, and test error less than 5%）, accurate temperature control （within 1℃）, and friendly interface. Using formaldehyde gas as sample, the material chip is made of metal salt ion surface modifying nanometer SnO2, which is tested in the platform. It is found that 0.01 mol/LCrCh, 0.02 mol/LCrCh, 0.03 mol/L CaCh, 0.03 mol/L TiCl4 doped nanometer SnO2 materials has good response on formaldehyde at 300℃. And it verifies the feasibility of the gas sensitive material test platform being used for high throughput screening material.

关 键 词：高通量 气敏材料 筛选平台 敏感度 

分 类 号：TN304.21[电子电信—物理电子学]