聚二甲基二烯丙基氯化铵元件的氨敏性能研究  

Study on ammonia-sensing performance of polydimethyldiallylammonium chloride gas sensor

作　　者：詹爽[1,2] 李冬梅[1] 梁圣法[1] 陈鑫[1] 李霞[2] 

机构地区：[1]中国科学院微电子研究所纳米加工与新器件集成技术实验室,北京100029 [2]青岛科技大学材料科学与工程学院,山东青岛266042

出　　处：《电子元件与材料》2013年第1期31-33,共3页Electronic Components And Materials

基　　金：国家"973"计划资助项目(No.2009CB939703);中国科学院"先导专项"资助项目(No.XDA06020102)

摘　　要：采用聚二甲基二烯丙基氯化铵(PDDAC)作为敏感膜材料,以聚酰亚胺(PI)薄膜为柔性衬底制备了气敏元件,利用能谱分析(EDX)和原子力显微镜(AFM)对PDDAC敏感膜的组成和形貌进行了表征,通过检测元件电阻随氨气浓度的变化对元件的氨敏性能进行了研究。结果表明:室温下,该元件对体积分数为200×10–6的氨气的响应灵敏度为82%,且具有较好的响应-恢复特性,响应时间和恢复时间分别为68 s和63 s。A novel kind of flexible room temperature gas sensor was fabricated by deposited poly-dimethyldiallylammonium chloride（PDDAC） on the flexible polyimide（PI） substrate.The composition and morphology of the sensitive membrane were characterized by energy dispersive X-ray detector（EDX） and atomic force microscopy（AFM）.The ammonia-sensing performance of the prepared sensor was studied by testing the resistance that varied with the ammonia concentration.The results indicate that the response sensitivity of the sensor is 82% to NH3 with volume fraction of 200×10–6 at room temperature,moreover,such sensor exhibits superior response-recovery characteristics,and their response time and recovery time are 68 s and 63 s respectively.

关 键 词：柔性衬底 聚二甲基二烯丙基氯化铵 室温 氨敏性能 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]