PCVD直流脉冲频率对TiN/TiSiN复合涂层结构与性能的影响  

Influence of PCVD DC Pulse Frequencies on TiN/TiSiN Multilayer Coatings Microstructure and Properties

作　　者：宋之敏[1] 曾天[1] 高见[2] 李洪林[2] 宿福利[1] 李祝[1] 

机构地区：[1]四川大学分析测试中心 [2]成都工具研究所有限公司

出　　处：《工具技术》2012年第12期13-17,共5页Tool Engineering

摘　　要：为了探讨频率对硬质合金基体上TiN/TiSiN复合涂层组织结构及性能的影响,选择了几个不同频率来制备TiN/TiSiN复合涂层。研究结果表明:不同频率制备TiN/TiSiN复合涂层的表面形貌都呈圆盘状颗粒,频率在30kHz-70kHz变化时,复合涂层颗粒尺寸随频率的增加而增大,均匀性随频率的增加而变差;复合涂层频率在30kHz-70kHz变化时,TiN始终在(200)方向上择优取向;硬质合金基体上,TiN/TiSiN复合涂层比单一TiN涂层的硬度提高更大,从1973 HV0.05增加到3417 HV0.05;30kHz时TiN/TiSiN复合涂层的硬度、涂层结合力和耐磨性能明显优于其他两种TiN/TiSiN复合涂层。故在硬质合金基体上,30kHz制备的TiN/TiSiN复合涂层工艺最佳。Several frequencies to depose TiN/TiSiN muhilayer coatings were selected in the paper in order to study the influence of the frequency to TiN/TiSiN multilayer coatings microstructure and properties on substrate of WC - Co. The results of the study show that the surface morphology of TiN/TiSiN coatings were the disc particles. TiN phase of TiN/Ti- SiN coatings had selected growth direction on （200） crystal side when the frequency of 30kHz -70kHz; TiN/TiSiN multi- layer coatings than single TiN coatings hardness improve considerably from 1973 HV0.05 increased to 3417 HV0.05. The micro - hardness, adherence sthength and the wear property of TiN/TiSiN that were coated by the frequency of 30kHz were better than that of other TiN/TiSiN muhilayer coatings. So, the condition of 30kHz is the best to depose TiN/TiSiN multi- layer coatings on substrate of WC - Co.

关 键 词：TIN TiSiN涂层 脉冲频率 微观结构 性能 

分 类 号：TG174.4[金属学及工艺—金属表面处理]