基于超声测长技术和激光干涉技术的0～2500Pa压力基准装置设计  

Design of the 0-2500 Pa Pressure Primary Standard Device Based on Ultrasonic Measuring Technology and Laser Interference Technique

作　　者：李燕华[1] 王金库[1] 

机构地区：[1]中国计量科学研究院,北京100013

出　　处：《计测技术》2012年第6期41-45,共5页Metrology & Measurement Technology

摘　　要：介绍了一种新型的补偿式微压基准,该基准装置的压力测量范围为0～2500 Pa并采用去离子水为工作介质,装置采用超声技术实现两端容器微小液位差的精确测量,同时利用激光干涉技术实现补偿容器移动距离的精确测量,基准装置主要由U型容器系统、伺服驱动系统、超声定位系统、激光测长系统、恒温槽及温度控制系统以及数据采集处理系统组成。A newly developed micro-manometer covering the pressure range of 0 -2500 Pa for gauge pressure is described. The micro-ma- nometer employs the distilled water as the working medium and is based on the U-type compensated principle. The water level in the two vessels was detected by ultrasonic time of flight measurement, and the displacement of the removable vessel was detected by a laser interferometer. The system composed of U-type vessel configuration, servo-driver system, ultrasonic time of flight measurement system, laser interferometer detection system, thermostat system and data acquisition and processing system.

关 键 词：压力计量 压力测量 压力基准 液体压力计 微压计 

分 类 号：TB931[一般工业技术—计量学]