固体金属二次电子发射的Monte-Carlo模拟  

Monte-Carlo simulation of secondary electron emission from solid metal

作　　者：常天海[1] 郑俊荣[1] 

机构地区：[1]华南理工大学电子与信息学院,广州510640

出　　处：《物理学报》2012年第24期141-148,共8页Acta Physica Sinica

基　　金：国家自然科学基金科学部主任基金(批准号:51047002)资助的课题~~

摘　　要：二次电子的发射在生产实践中有着广泛的应用,但其相关测量结果受实验环境和实验仪器的影响很大,在实验中难以精确测量.所以本文建立了一个包含二次电子激发、在固体内部传输和最后逸出固体表面的二次电子系统模型.采用Monte-Carlo的模拟方法仿真二次电子运动轨迹,定量分析二次电子的发射系数和能谱分布.并探讨它们与一次电子的入射角度和入射能量的关系.仿真结果表明:本文建立的二次电子系统模型能较好地反映实际情况.通过该模型仿真,可以定量得到二次电子发射系数和能谱分布与一次电子的入射能量和入射角度的关系.The secondary electron emission is widely used in production practice, but it is difficult to measure accurately because the measuring result is severely affected by the experimental environment and equipment. A model of secondary electron emission is proposed in this paper. The model has three sections： the generation of secondary electrons, the motions of secondary electrons inside the solid and the escape of secondary electrons from the solid surface. Based on Monte-Carlo method, the relationship between the secondary electron emission coefficient and the range of energy with the energy and angle of the incident electrons is also analyzed. Simulation results show that the model proposed in this paper is corresponding to the actual condition very well. The relation between the secondary electron emission coefficient and the range of energy with the energy and angle of the incident electron is obtained.

关 键 词：二次电子 MONTE Carlo 发射系数 能谱分布 

分 类 号：O462.2[理学—电子物理学]