光波导短程透镜加工容限误差研究  

Fabrication tolerances in four analytical designs of geodesic lenses

作　　者：李杰[1] 朱京平[1] 

机构地区：[1]电子物理与器件教育部重点实验室,陕西省信息光子技术重点实验室,电信学院,西安交通大学,西安710049

出　　处：《物理学报》2012年第24期287-294,共8页Acta Physica Sinica

基　　金：国家自然科学基金面上项目(批准号:60377020);国家自然科学基金青年基金(批准号:61205187);中国博士后科学基金(批准号:2012M510217)资助的课题~~

摘　　要：本文利用数值计算的方法,研究比较了目前常用的四种解析解设计的短程透镜凹坑深度方向加工误差对其聚焦效果的影响,得到了该方向加工误差与其焦距改变量之间的定量关系.结果表明:这四种解析解设计的短程透镜凹坑深度相对加工误差△Zo/Zo与焦距的相对改变量△b/b的比值为一常数.根据这一关系给出了几种典型集成光学器件中短程透镜的加工容限误差.上述研究可为高分辨率光学器件的设计、制作提供理论支持和指导.Waveguide geodesic lenses are key basic components in guide wave optical devices. Since their focus characteristics are indepen- dent of the wavelengths and the moded of the guided waves. Geodesic lenses lend themselves extremely well to the integrated optical devices. In this paper, the effects of fabrication errors of geodesic lenses described by four improved analytical solutions are studied by numerical analysis. The relations between the changes of the focal length and the depth changes due to fabrication errors of these lenses are obtained and compared. Considering the use of geodesic lenses in integrated optical devices, the fabrication tolerances of these lenses are given.

关 键 词：集成光学 短程透镜 数值计算 加工容限误差 

分 类 号：TN252[电子电信—物理电子学]