热丝CVD金刚石涂层硬质合金衬底两步法预处理的研究  

Two-step etching pretreatment on WC-Co substrate for HFCVD deposition

作　　者：刘海涛[1] 向道辉[1] 杨广斌[1] 梁松[1] 马德印 

机构地区：[1]河南理工大学机械与动力工程学院,河南焦作454000 [2]湖北中非膨润土有限公司,湖北鄂州436061

出　　处：《金刚石与磨料磨具工程》2012年第6期25-28,共4页Diamond & Abrasives Engineering

基　　金：教育部博士点基金(20104116120003);大连理工大学精密与特种加工教育部重点实验室基金(JMTZ201001)

摘　　要：研究了引入超声振动后酸碱两步法预处理对硬质合金衬底表面去Co催石墨化作用。采用偏压增强辅助热丝化学气相沉积(HFCVD)法,在硬质合金衬底上沉积了一层均匀、光滑的金刚石薄膜。研究结果表明:在酸碱两步法预处理过程中引入超声振动,能够有效的去除硬质合金衬底表面的Co元素,衬底表面发生了明显的粗化;采用Murakami试剂超声振动20 min腐蚀WC相,再用V(H2SO4)∶V(H2O2)=3∶7混合溶液超声振动30 s去除Co相,金刚石薄膜形核密度高、结晶质量好。这说明了超声酸碱两步法预处理能够有效的抑制钴对金刚石薄膜的不利影响,对提高金刚石薄膜与基体之间的附着力起着非常重要的作用。Two-step etching pretreatment method concentration on the surface of WC-Co substrate. with ultrasonic vibration was applied to reduce the Co A layer of smooth and homogeneous diamond film was deposited on the surface of WC-Co substrate by the bias-enhanced hot filament chemical vapor deposition （HFCVD） method. The two-step etching pretreatment method with ultrasonic vibration could effectively remove Co and obviously generate coarsening on the surface of WC-Co. When using Murakami reagent to etch for 20 rain, then using V（ H2SO4 ）： V（ H2O2 ） = 3： 7 solution to remove cobalt for 30 s, the nucleation density of diamond film was high and the quality of crystallization was very good. The two-step etching pretreatment method with ultrasonic vibration important role in increasing the can effectively inhibit the adverse effect of Co to diamond film, and plays an adhesion strength between diamond film and substrate.

关 键 词：金刚石薄膜 两步法预处理 硬质合金 热丝化学气相沉积法 

分 类 号：TQ164[化学工程—高温制品工业] TG74[金属学及工艺—刀具与模具]