溶胶-凝胶法制备工艺参数对Al_2O_3-SiO_2薄膜质量的影响  

Influence of Sol-Gel process parameter on quality of Al_2O_3-SiO_2 films

作　　者：同帜[1] 邹力[1] 崔双科 李大川 

机构地区：[1]西安工程大学环境与化学工程学院,西安710048 [2]陕西省现代建筑设计研究院,西安710048

出　　处：《粉末冶金材料科学与工程》2012年第6期818-824,共7页Materials Science and Engineering of Powder Metallurgy

基　　金：陕西省科技厅工业攻关项目(2009K06-27)

摘　　要：采用溶胶-凝胶法制备Al2O3-SiO2复合薄膜,研究溶胶成分、水解反应温度、热处理环境及烧结温度对薄膜质量的影响。通过黏度测试、热重分析仪(TG-DTG)、X射线衍射分析仪(XRD)和原子力显微镜(AFM)对样品进行表征。结果表明,溶胶的组成与热处理过程中的应力不均是导致薄膜开裂的主要原因。当Al2O3:SiO2(mol/mol)=1:3或1:2,水解反应温度为40℃,热处理环境湿度70%,温度60℃,以0.5℃/min的升温速率升至600℃焙烧2 h,缓慢升温且适当保温,可得完好的Al2O3-SiO2复合薄膜,所制备的块状薄膜,无裂缝且均匀透明。Al2O3-SiO2 composite films were prepared by sol-gel process. The effects of components of sol, temperature of hydrolyze reaction, ambience of heating up and temperature of sinter on the quality of films were investigated. The samples were characterized by viscosity measurements, thermal gravity analysis-differential thermal gravity（TG-DTG）, X-ray diffraction （XRD） and atomic force microscope（AFM）. The results show that the cracking of the gel films is mainly related to the composition of sol and the unbalanced stress produced during heating process. The bulky Al2O3-SiO2 films can be prepared in case of Al2O3-SiO2 （mol/mol）=1：3 or 1：2, hydrolysis reaction temperature of 40 ℃, heat treatment at ambient humidity of 70% and temperature of 60 ℃, calcine for 2 h at 600℃ （elevated with rising speed of 0.5 ℃/min）. The prepared bulky films are crack-free and transparent.

关 键 词：溶胶-凝胶 Al2O3-SiO2复合薄膜 防开裂 

分 类 号：O611.4[理学—无机化学]