Effect of the nonlinearity of the CCD in Fourier transform profilometry on spectrum overlapping and measurement accuracy  

作　　者：乔闹生 邹北骥 

机构地区：[1]School of Information Science and Engineering, Central South University [2]School of Physics and Electronics, Hunan University of Arts and Science

出　　处：《Chinese Physics B》2013年第1期237-242,共6页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China (Grant Nos. 61173122, 60970098, 60803024, 90715043, and 61144006);the Postdoctoral Startup Foundation of Central South University, China (Grant No. 1332/74341016030)

摘　　要：In Fourier transform profilometry （FTP）, we must restrain spectrum overlapping caused by the nonlinearity of the charge coupled device （CCD） and increase the measurement accuracy of the object shape. Firstly, the causes of producing higher-order spectrum components and inducing spectrum overlapping are analysed theoretically, and a simple physical ex- planation and analytical deduction are given. Secondly, aiming to suppress spectrum overlapping and improve measurement accuracy, the influence of spatial carrier frequency of projection grating on them is analysed. A method of increasing the spatial carrier frequency of projection grating to restrain or reduce the spectrum overlapping significantly is proposed. We then analyze the mechanism of how the spectrum overlapping is reduced. Finally, the simulation results and experimental measurements verify the correction of the proposed theory and method.In Fourier transform profilometry （FTP）, we must restrain spectrum overlapping caused by the nonlinearity of the charge coupled device （CCD） and increase the measurement accuracy of the object shape. Firstly, the causes of producing higher-order spectrum components and inducing spectrum overlapping are analysed theoretically, and a simple physical ex- planation and analytical deduction are given. Secondly, aiming to suppress spectrum overlapping and improve measurement accuracy, the influence of spatial carrier frequency of projection grating on them is analysed. A method of increasing the spatial carrier frequency of projection grating to restrain or reduce the spectrum overlapping significantly is proposed. We then analyze the mechanism of how the spectrum overlapping is reduced. Finally, the simulation results and experimental measurements verify the correction of the proposed theory and method.

关 键 词：spectra overlapping measurement accuracy nonlinearity of CCD Fourier transform profilometry 

分 类 号：TN386.5[电子电信—物理电子学]