悬砂法工艺参数对精密切割用线锯制备质量影响的研究  

Effect of Sand-suspend-electroplated Process Parameters on the Quality of Electroplated Diamond Wire Saw

作　　者：高航[1] 黄均亮[1] 袁和平[2] 滕晓辑[1] 

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室,大连116024 [2]中国科学院大连化学物理研究所,大连116000

出　　处：《人工晶体学报》2012年第6期1488-1493,共6页Journal of Synthetic Crystals

基　　金：国家自然科学基金重点项目资助(51135002);高档数控机床与基础制造装备科技重大专项课题资助(2012ZX04003-031)

摘　　要：为实现KDP、CZT等光学元件用软脆功能晶体坯料的精密切割,研究了悬砂法制备电镀金刚石微粉磨料线锯工艺方法,通过扫描电镜形貌观测,试验分析了不同电流密度、电镀时间和金刚石悬浮量条件下制备的线锯样件质量,探讨了工艺参数对线锯电镀质量的影响及缺陷产生的原因。试验结果表明,悬砂法制备金刚石微粉磨料线锯能够克服埋砂法存在的微粉磨粒分散性差、易导致连续运动的丝线挂砂困难等问题,在合理的工艺参数条件下能够获得磨料分布均匀的电镀金刚石微粉磨料丝线。The sand-suspend-electroplating technique for diamond micro powder wire saw fabricating is developed to realize precision sawing of optical crystals with soft and brittle characters such as KDP,CZT and other optical components.The effect of parameters such as cathode current density,electroplating time and abrasive concentration on the electroplating quality of the wire saw was experimentally analyzed by the SEM.The forming mechanism of the produced defects in composite electroplating process was discussed.The xperimental results show that the problems of aggregating of micro diamond grits and difficult to take the micro grits on the wire in continuously moving process can be solved by the sand-suspend-electroplating technique developed.The uniform distribution of the abrasive diamond grits on the wire saw can be obtained with reasonable electroplating process parameters.

关 键 词：复合电镀 金刚石微粉磨料线锯 悬砂法 

分 类 号：TQ153[化学工程—电化学工业] TG74[金属学及工艺—刀具与模具]