KBA型X射线显微系统  

KBA X-ray microscopy system

作　　者：赵玲玲[1] 孙德林[2] 胡家升[3] 

机构地区：[1]鲁东大学信息与电气工程学院,山东烟台264025 [2]鲁东大学交通学院,山东烟台264025 [3]大连理工大学电子与信息工程学院,辽宁大连116024

出　　处：《强激光与粒子束》2013年第2期371-374,共4页High Power Laser and Particle Beams

基　　金：山东省自然科学基金项目(ZR2011AQ023)

摘　　要：KBA型X射线显微镜的物与像不在同一水平面上,采用双对准方式解决了在靶室安装这套仪器的困难。与通常的光学系统不同,KBA显微镜的伪光轴与实轴夹角8.748 6°,设计了观察系统,保证了掠入射角的要求。KBA显微镜的物方孔径角很小,用可见光装调焦深很大,无法满足要求,因此设计了辅助光学成像系统,满足了焦深为±5mm的要求。The object and the image of the KBA X-ray microscope are not in the same horizontal plane. To overcome the difficulty of installing the KBA X-ray microscope in the target chamber,a double-aiming mode is adopted. Unlike general optical sys- tems, the angle of the KBA X-ray microscope between the pseudo-axis and the real axis is 8. 748 6°,thus an observing system is designed to satisfy the demand of the grazing incident angle. As the object angle is small, the focus depth is too big if the visual light is used to install the microscope, so an auxiliary optical system is designed, and the focus depth is within ±5 mm.

关 键 词：X射线成像 KBA显微镜 掠入射 消像散系统 

分 类 号：O434.19[机械工程—光学工程]