射频MEMS技术在雷达中的应用现状与优势  

Current Status and Advantages of RF MEMS Technology in Radar Applications

作　　者：张蕾[1] 沙舟[1] 林晶[1] 

机构地区：[1]南京电子技术研究所,南京210039

出　　处：《中国电子科学研究院学报》2012年第6期565-570,共6页Journal of China Academy of Electronics and Information Technology

摘　　要：射频MEMS技术为实现微型化、集成化及智能化,以及探索具有新原理和新功能的器件与系统提供了重要途径。概述了射频MEMS的主要优势和在雷达领域的主要应用方向,在此基础上重点介绍了国外基于射频MEMS技术的T/R组件设计、X波段相控阵天线演示验证系统及针对Ka波段低成本无源相控阵的探索情况,并给出了新一代MEMS高集成度电子扫描阵列研究项目的最新进展。In addition to implementing miniaturization,integration and intelligence,RF MEMS technology provides an important approach for developing components and systems with brand new principles and new functions.Leading advantages of RF MEMS and main directions of its applications in radar field are introduced.On the basis of that,examples of T/R module design,X-band phased array antenna demonstration system as well as low-cost Ka-band passive phased array based on RF MEMS technology in the foreign countries are presented.And the latest research results of the project centered on MEMS highly-integrated electronic scanning array of next generation are given.

关 键 词：射频微机电系统(RF MEMS) 电子扫描阵列(ESA)雷达 基于MEMS的射频前端 MEMS实时延迟线 

分 类 号：TN454[电子电信—微电子学与固体电子学]