TDX-200透射电镜照明系统的计算与仿真  

Calculation and the simulation of the illumination system of the TDX-200 TEM

作　　者：李鹏[1] 董全林[1] 冯迪[1] 杨彦杰[1] 崔永俊[1] 

机构地区：[1]北京航空航天大学仪器科学与光电工程学院微纳测控与低维物理教育部重点实验室 国家"惯性技术"重点实验室精密光机电一体化技术教育部重点实验室,北京100191

出　　处：《国外电子测量技术》2012年第12期50-54,共5页Foreign Electronic Measurement Technology

基　　金：国家科技支撑计划课题(2006BAK03A24)

摘　　要：透射电子显微镜(transmission electron microscopy,TEM)的照明系统包括电子枪和聚光镜,它要求能提供最大亮度的电子束,照射在样品上的电子束孔径角必须能在一定范围内调节,照明斑点的大小可按需要选择。在调试过程中需要预先对照明系统激励参数进行计算。基于TDX-200透射电子显微镜,对双聚光镜照明系统的功能实现进行了理论分析,结合实际尺寸进行了理论计算与实际仿真,并在实际调试过程中进行了初步验证。The illumination system of the transmission electronic microscope （TEM） including two parts：the electron gun and the condenser lens system. For the illumination system, there have the following requirements：the illumination system needs to be able to provide a maximum brightness of the electron beam; the aperture angle of the electron beam illu-minating the sample can be adjustment in a certain range;the illuminating spot size should be chosen according to need. During the debugging process, the excitation parameters of the illumination system need to be calculated at first. This article analyses the function implementation of the double condenser lens illumination system. Based on the actual size of the TDX 200 TEM, this article has proceeded the calculation with the theory and simulation method, and the result of the cal- culation is verified in the actual debugging process.

关 键 词：透射电子显微镜(TEM) 照明系统 

分 类 号：TN16[电子电信—物理电子学]