基于光学读出的微悬臂梁温度传感器研制  

Development of a Microcantilever Temperature Sensor Based on Optical Readout

作　　者：邬林[1] 吴定强 张青川[1] 

机构地区：[1]中国科学技术大学中科院材料力学行为和设计重点实验室,合肥230027 [2]大庆油田测试技术服务分公司,大庆163453

出　　处：《实验力学》2012年第6期696-702,共7页Journal of Experimental Mechanics

基　　金：国家自然科学基金(批准号:11127201、11072233)资助的课题

摘　　要：为实现对环境温度的高分辨率、快速、准确测量,设计制作了一种基于光学读出的微悬臂梁温度传感器。由于组成微悬臂梁的两种材料金和氮化硅热膨胀系数的差异,在温度变化时,梁内部会产生热应力导致其弯曲变形。不同温度下梁的弯曲变形量不同,利用光杠杆方法检测出此变形,经标定后就能实现环境温度的准确测量。实验中设定系统光臂长度为25mm,采用商业化三角形微悬臂梁(长200μm、宽40μm、氮化硅层厚0.6μm,金层厚60nm)对传感器进行了测试,实验结果显示其测量重复性好,温度分辨率达到0.02℃。对于特定尺寸的微悬臂梁,通过优化其双材料厚度比,温度分辨率可达10-4℃,可用于环境温度的精密测量。In order to realize rapid,precise and high-resolution measurement of ambient temperature,a microcantilever temperature sensor was self-designed and manufactured based on optical readout.The bending deformation of microcantilever caused by internal thermal stress variation along with temperature due to the thermal expansion coefficient of two materials-gold and silicon nitride.Then,temperature can be accurately measured by calibrating the cantilever deflection based on optical lever method.In experiment,a commercially available triangular microcantilever was tested（Its parameters： length 200μm,width 40μm,0.6μm thickness of SiNx,and 0.06μm thickness of Au）.Experimental results show that the sensor presents good measurement repeatability;its temperature resolution reaches 20mK,when 25mm length of optical arm was set.For a particular microcantilever size,the temperature resolution can be as high as 0.01mK by optimizing bi-material thickness ratio,which can be used for precise temperature measurement.

关 键 词：微悬臂梁 温度传感器 光杠杆 高分辨率 热应力 

分 类 号：TP212.11[自动化与计算机技术—检测技术与自动化装置]