Ti、TiN、TiO_2改性层的纳米力学性能测试与分析  

Nanomechanical Properties Test and Analysis of Ti,TiN and TiO_2 Modified Layers

作　　者：张星[1] 王鹤峰[1] 袁国政[1] 树学峰[1] 

机构地区：[1]太原理工大学应用力学与生物医学工程研究所,山西030024

出　　处：《实验力学》2012年第6期721-726,共6页Journal of Experimental Mechanics

基　　金：国家自然科学基金(No.11172195)资助

摘　　要：采用等离子表面合金化技术,分别在316L不锈钢表面制备出渗Ti改性层、渗TiN改性层和TiO2改性层薄膜。使用连续刚度法,从截面方向和表面方向对改性层进行纳米压痕实验,研究改性层的纳米力学性能。实验测得材料在压痕过程中的载荷-位移曲线以及硬度和模量随压入深度的连续变化值。结果表明,改性层纳米力学特性表现为各向异性;TiN改性层的力学性能表现良好。TiO2改性层由渗Ti改性层经氧化制成,二者的弹性模量和硬度在截面方向上变化规律相似,在表面方向上数值相近。Modified layers were prepared by infiltrating Ti,TiN and TiO2 on the surface of 316L stainless steel,respectively,based on plasma surface alloying technique.Using continuous stiffness measurement（CSM）,nanoindentation experiment for the substrate and modified layers,from cross-section normal direction and surface normal direction,respectively,to investigate the nanomechanical properties of modified layer.Load-displacement curve of the material in indentation process,and the continuous variation of hardness and modulus along with the indentation depth were obtained,respectively.Results show that mechanical properties of modified layer present anisotropy;the TiN modified layer presents good mechanical performance;The modulus-displacement and hardness-displacement curves of TiO2 modified layer and Ti modified layer show similar variation in experiment of loading from cross-section normal direction,and show familiar values in experiment of loading from surface normal direction,respectively,due to the TiO2 modified layer was generated by the oxidation of Ti modified layer.

关 键 词：改性层 纳米压痕 硬度 弹性模量 

分 类 号：TG146.23[一般工业技术—材料科学与工程]