基于集成电路制造装备仿真平台的测试系统设计  

Design of Test System Software Based on IC Equipment Simulation Platform

作　　者：李春光[1] 黄利平[1] 田凌[1] 许霞[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《测控技术》2013年第1期95-98,共4页Measurement & Control Technology

基　　金：国家科技重大专项资助项目(2009ZX02001-003)

摘　　要：基于测试集成电路制造装备仿真平台软件仿真功能的正确性、稳定性和可靠性,开发一种可用于测试仿真设备功能的软件系统。该系统采用分层的架构设计方法,提供测试信息的静态配置和动态运行两种工作模式,有效地解决了不同设备测试任务多样化的问题。该软件架构具有一定的通用性和易扩展性,可作为多任务复杂测试系统的一种通用架构。同时还设计了单命令测试、多命令随机测试、多命令逻辑测试3种类型的测试方法,以提高测试灵活性。运用多线程技术,做合理的线程优化处理,解决了系统运行效率低和通信混淆问题。In order to test the accuracy, stability and reliability of IC equipment simulation platform, a kind of test system software is developed which can be used to test simulation devices. Layed software frame is used, and two operating modes are provided for test information, which is static configuration and dynamic running. By using static configuration and dynamic running, the complex and diverse test task can be efficiently accom plished. The features of the layed software frame have universality and extensibility, and can be used as a gen eral software frame for multitask and complex test system. Three kinds of test methods are introduced to help improve flexibility, which are single command test, command sequence test and logic command sequence. Multithreading technology is used to solve the problems of low efficiency of system operation and communica tion confusion

关 键 词：测试系统 软件架构 多线程 集成电路 

分 类 号：TP311.5[自动化与计算机技术—计算机软件与理论]