量热式集成传感器的热电模拟及实验研究  

Heat-Electricity Analogy and Experimental Investigation of Thermal Integrated Sensors

作　　者：黄金彪[1] 童勤义[1] 

机构地区：[1]东南大学微电子中心,南京210018

出　　处：《Journal of Semiconductors》1991年第10期625-632,共8页半导体学报（英文版）

基　　金：国家自然科学基金

摘　　要：本文把最热式传感器中的热传输看成行波,利用热电模拟及传输线分析方法,计算了热传输函数并得到了实验的验证,在此基础上进一步计算了传感器的增益稳定裕度、相对不平衡度和闭环增益等性能,为传感器的设计提供了重要的依据.该方法具有准确、直观、求解方便等优点.最后本文给出了上述理论计算为基础设计的集成温度传感器的实验结果.This paper treats the heat transmission in thermal sensors as a travelling wave.The heat-electricity analogy and transmission-line method have been adopted. The thermal transfer func-tion has been calculated and vertified experiment.The gain margin relative non-equilib-rium constant, and closedloop gain of the sensors are also calculated. These features can di-rect the design of the sensors. The analysis method has the advantage of high accuracy, audio-visual, convenience for solving, etc..Finally, an integrated temperature sensor has been desig-ned and manufactured by CMOS technology on the basis of above theoretic calculation.

关 键 词：量热式 集成传感器 热电模拟 实验 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]