聚氯代对二甲苯薄膜聚集态结构的研究进展  

Development of the Research on the Structure of the Aggregated State of Parylene C Film

作　　者：张豪[1] 温茂萍[1] 田勇[1] 谭凯元[1] 

机构地区：[1]中国工程物理研究院,绵阳621900

出　　处：《材料导报》2013年第1期99-102,共4页Materials Reports

基　　金：国家自然科学基金(51173173)

摘　　要：介绍了国内外聚氯代对二甲苯薄膜(PC膜)聚集态结构的研究动态,包括PC膜聚集态结构的表征,随沉积条件、温度变化的演变及其与宏观性能的关系。对PC膜聚集态结构的表征主要局限于晶胞结构、细观形貌。在沉积条件中,沉积压力和温度是影响PC膜聚集态结构的主要因素,同时PC膜在高温下会发生晶相转换以及结晶度的变化,而其聚集态结构的差异会对PC膜的透湿性、力学性能及其表面性能产生显著影响。针对PC膜面向微器件的应用,进一步提出在其聚集态结构方面有待深入研究的问题。Internal and external research development in the structure of the aggregated state of parylene C （PC） film is introduced, including the characterization of the structure of the aggregated state of PC film, the effect of deposition conditions and temperature on the structure of the aggregated state and its correlation with macroproper ties. The characterization of the structure of the aggregated state of PC film is restricted to its crystal structure and microstructure. Deposition pressure and temperature are the main factors in deposition conditions, crystallographic phase transformation and crystallinity variation of the structure of the aggregated state of PC film can occur at high temperature, and different structure can impact on water vapor transmission property, mechanical and surface proper ties. Concerning the application in microdevices, issues about the further studies on the structure of the aggregated state of PC film are put forward.

关 键 词：聚氯代对二甲苯 PC膜 聚集态 

分 类 号：TQ322[化学工程—合成树脂塑料工业]