面向半导体废水回用处理的MBR-RO组合工艺可行性  

FEASIBILITY OF SEMICONDUCTOR WASTEWATER RECLAMATION BY USING MBR-RO PROCESS

作　　者：肖燕[1] 陈彤 胡永健 韩永萍[1,3] 林亚凯 王晓琳[1] 

机构地区：[1]清华大学化学工程系,膜材料与工程北京市重点实验室,100084 [2]北京赛诺水务科技有限公司,100083 [3]北京联合大学生物工程学院,100023 [4]北京赛诺膜技术有限公司,北京100083

出　　处：《水处理技术》2013年第2期102-106,111,共6页Technology of Water Treatment

基　　金：国家重点基础研究发展计划(973计划)项目(2009CB623401);国家高技术研究发展计划(863计划)项目(2009AA062901,2012AA03A604);北京市自然科学基金重大项目(2100001)

摘　　要：半导体废水水质复杂,污染物种类繁多,经过初级物化处理后,仍含大量悬浮物、有机物和无机盐,亟待有效处理并回用。本工作采用MBR-RO中试装置深度处理半导体废水,考察该工艺实现废水回用的可行性。试验结果表明,MBR-RO系统表现出良好的污染物去除效果和运行稳定性,可以耐受废水水质波动的范围大。MBR运行稳定,膜的渗透性易于恢复,维护性清洗周期较长(大于16 d)。MBR出水已检测不到SS,其SDI15和COD的平均值分别为2.3和10.6 mg/L,水质满足RO进水设计要求。采用HCl调节RO进水pH,同时投加阻垢剂MAS208A有助于减缓RO膜污染。RO出水水质优良,电导率为26～142μS/cm,TOC质量浓度小于0.2 mg/L,符合生产回用水要求,表明MBR-RO组合工艺实现半导体废水回用是可行的。After primary physical-chemical treatment, the semiconductor wastewater contained high concentrations of SS, organics and inorganic salts. It is thus urgent to seek promising technology for semiconductor wastewater reclamation. In this work, a pilot-scale MBR-RO integrated system was developed for semiconductor wastewater reclamation. The study shows that the MBR-RO system is able to treat the semiconductor wastewater of unstable quality with good system stability and high contaminant removal efficiency. The MBR membrane permeability is easily recovered by maintenance cleaning （cycle 〉 16 days）. The MBR effluent exhibits stable quality with SS less than measuring limit, SDI15 of 2.3 and COD of 10.6 mg/L on average, which meets the quality requirement of RO feed water. The RO membrane permeability is well maintained by adjusting RO feed pH with HC1 and adding scale inhibitor MAS208A. The RO product water exhibits good quality with TOC less than 0.2 mg/L, conductivity of 26- 142 μS/cm, which meets the semiconductor reuse water standard, This work demonstrates the feasibility of using MBR-KO integrated system for semiconductor wastewater reclamation.

关 键 词：半导体废水 回用 MBR RO 可行性 

分 类 号：X703.1[环境科学与工程—环境工程]